Dwelling time calculation for film uniformity correction by ion beam sputtering process on larger optical materials
نویسندگان
چکیده
منابع مشابه
Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2020
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1507/10/102003